標題: | Electroplated Ni-CNT Nanocomposite for Micromechanical Resonator Applications |
作者: | Lee, Yi-Chia Li, Ming-Huang Cheng, Y. T. Hsu, Wensyang Li, Sheng-Shian 機械工程學系 電子工程學系及電子研究所 Department of Mechanical Engineering Department of Electronics Engineering and Institute of Electronics |
關鍵字: | Electroplated Ni-CNT nanocomposite;microelectromechanical systems (MEMS);quality factor;resonant frequency;resonator |
公開日期: | 1-Jun-2012 |
摘要: | In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show similar to 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators. |
URI: | http://hdl.handle.net/11536/16498 |
ISSN: | 0741-3106 |
期刊: | IEEE ELECTRON DEVICE LETTERS |
Volume: | 33 |
Issue: | 6 |
結束頁: | 872 |
Appears in Collections: | Articles |
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