標題: Design and fabrication of a micro electrostatic vibration-toelectricity energy converter
作者: Chiu, Yi
Kuo, Chiung-Ting
Chu, Yu-Shan
電控工程研究所
Institute of Electrical and Control Engineering
公開日期: 2006
摘要: This paper presents a micro electrostatic vibration-to-electricity energy converter. For the 3.3 V supply voltage and 1 cm(2) chip area constraints, optimal design parameters were found from theoretical calculation and Simulink simulation. In the current design, the output power is 200 mu W/cm(2) for the optimal load of 8 M Omega. The device was fabricated in a silicon-on-insulator (SOI) wafer. Mechanical and electrical measurements were conducted. Residual particles caused shortage of the variable capacitor and the output power could not be measured. Device design and fabrication processes are being refined.
URI: http://hdl.handle.net/11536/17337
ISBN: 978-2-916187-03-7
期刊: DTIP 2006: Symposium on Design,Test, Integration and Packaging of MEMS/MOEMS 2006
起始頁: 298
結束頁: 303
顯示於類別:會議論文