標題: The Effect of Oxygen Flow Rates on the Electrical Resistivity of MgO Thin Films in AC-PDPs
作者: Chou, Hong-Chieh
Kim, Sung-O
Chen, Kuang-Lang
Chen, Samuel
Lee, Chien-Pang
Hsu, Chien-Hsing
Chou, Kuo-Ching
Huang, Chih-Ming
光電工程學系
Department of Photonics
公開日期: 2006
摘要: Magnesium oxide thin films were deposited with different thickness and oxygen flow rates for investigation the effects of the electrical resistivity of MgO thin films in AC-PDPs. The surface roughness was characterized by AFM. It reveals that higher oxygen flow rate generates higher electrical resistivity of MgO thin films.
URI: http://hdl.handle.net/11536/17368
ISSN: 1738-7558
期刊: IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS
起始頁: 383
結束頁: 386
Appears in Collections:Conferences Paper