標題: Influence of cesium vapor on the properties of ITO films deposited by RF magnetron sputtering
作者: Lee, Shih-Nan
Yan, Ruei-Chih
Chen, Chin H.
應用化學系
Department of Applied Chemistry
公開日期: 2005
摘要: Indium tin oxide (ITO) thin films were deposited onto polyehtersulfone (PES) substrate at room temperature by negative sputter ion beam technology. The optical and electrical properties of ITO/PES substrates have been improved by introducing the Cs vapor during sputtering. Under our optimal condition, the resistivity of ITO/PES can reach 4.3 x 10(-4) Omega cm, which is lower than 1.6 x 10(-3) Omega cm of the traditional RF sputtered ITO films. The optical transmittance is 85% in visible region and surface morphology of the ITO/PES substrate shows the optimal surface roughness to be 0.95 nm (Ra; 0.74 nm).
URI: http://hdl.handle.net/11536/17925
ISBN: 978-957-28522-2-4
期刊: IDMC 05: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2005
起始頁: 759
結束頁: 761
Appears in Collections:Conferences Paper