完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Lin, HN | en_US |
dc.contributor.author | Chen, HW | en_US |
dc.contributor.author | Ko, CH | en_US |
dc.contributor.author | Ge, CH | en_US |
dc.contributor.author | Lin, HC | en_US |
dc.contributor.author | Huang, TY | en_US |
dc.contributor.author | Lee, WC | en_US |
dc.contributor.author | Tang, DD | en_US |
dc.date.accessioned | 2014-12-08T15:25:40Z | - |
dc.date.available | 2014-12-08T15:25:40Z | - |
dc.date.issued | 2005 | en_US |
dc.identifier.isbn | 4-900784-00-1 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/18084 | - |
dc.description.abstract | The influence of uniaxial process-induced strain on carrier channel backscattering in nanoscale MOSFETs is reported for the first time. It is observed that the backscattering ratio can be reduced by uniaxial tensile strain while it is increased by uniaxial compressive strain mainly due to strain-induced modulation in mean-free-path for backscattering and slight decrease in k(B)T layer thickness. Nevertheless, both strain polarities improve source-side injection velocity because of reduced carrier effective mass. Impact to current drive under uniaxial strain is analyzed in terms of mean-free-path, k(B)T layer thickness, ballistic efficiency and injection velocity. | en_US |
dc.language.iso | en_US | en_US |
dc.title | The impact of uniaxial strain engineering on channel backscattering in nanoscale MOSFETs | en_US |
dc.type | Proceedings Paper | en_US |
dc.identifier.journal | 2005 Symposium on VLSI Technology, Digest of Technical Papers | en_US |
dc.citation.spage | 174 | en_US |
dc.citation.epage | 175 | en_US |
dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
dc.identifier.wosnumber | WOS:000234973100067 | - |
顯示於類別: | 會議論文 |