標題: | A tilting micromirror with well-controlled digital angle through constrained lever structure |
作者: | Chiou, JC Kuo, CF Lin, YC 電控工程研究所 Institute of Electrical and Control Engineering |
關鍵字: | micro-mirror;lever;PolyMUMPs |
公開日期: | 2004 |
摘要: | In this paper, a tilting micromirror device that can achieve designed angle is proposed. A lever structure, driven by electrostatic actuators, was used to enlarge tilting angle. To obtain precise deflecting angle, the lever structure is constrained by the substrate. By applying a voltage, the electrostatic actuators drive the lever down to the substrate such that the micromirror device on the opposite side of the lever structure could be lifted. PolyMUMPs process was used to fabricate proposed micromirror devices. The actuators are simulated to investigate characteristics of the micromirror devices. Experimental results had indicated that the micromirror device could reach 10-degree tilting angle with 80V driving signal with 6.4% relative error compared to designed model. |
URI: | http://hdl.handle.net/11536/18139 http://dx.doi.org/10.1117/12.545378 |
ISBN: | 0-8194-5378-1 |
ISSN: | 0277-786X |
DOI: | 10.1117/12.545378 |
期刊: | MEMS, MOEMS, AND MICROMACHINING |
Volume: | 5455 |
起始頁: | 159 |
結束頁: | 165 |
Appears in Collections: | Conferences Paper |
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