標題: A tilting micromirror with well-controlled digital angle through constrained lever structure
作者: Chiou, JC
Kuo, CF
Lin, YC
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: micro-mirror;lever;PolyMUMPs
公開日期: 2004
摘要: In this paper, a tilting micromirror device that can achieve designed angle is proposed. A lever structure, driven by electrostatic actuators, was used to enlarge tilting angle. To obtain precise deflecting angle, the lever structure is constrained by the substrate. By applying a voltage, the electrostatic actuators drive the lever down to the substrate such that the micromirror device on the opposite side of the lever structure could be lifted. PolyMUMPs process was used to fabricate proposed micromirror devices. The actuators are simulated to investigate characteristics of the micromirror devices. Experimental results had indicated that the micromirror device could reach 10-degree tilting angle with 80V driving signal with 6.4% relative error compared to designed model.
URI: http://hdl.handle.net/11536/18139
http://dx.doi.org/10.1117/12.545378
ISBN: 0-8194-5378-1
ISSN: 0277-786X
DOI: 10.1117/12.545378
期刊: MEMS, MOEMS, AND MICROMACHINING
Volume: 5455
起始頁: 159
結束頁: 165
Appears in Collections:Conferences Paper


Files in This Item:

  1. 000223909200018.pdf

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.