標題: NBTI effects of pMOSFETs with different nitrogen dose imlantation
作者: Lee, YJ
Tang, LC
Wu, MH
Chao, TS
Ho, PT
Lai, D
Yang, WL
Huang, TY
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 2004
摘要: NBTI effects with different nitrogen dose implantation and regions were investigated. High nitrogen dose implantation in the channel or source/drain extension results in serious NBTI degradation. Both the dynamic NBTI effects and substrate hot holes effects were also discussed. DNBTI and I-CP were measured simultaneously. Reduction of DeltaV(TH) and I-CP after positive gate bias stressing is related with the recovery of interface states.
URI: http://hdl.handle.net/11536/18213
http://dx.doi.org/10.1109/RELPHY.2004.1315449
ISBN: 0-7803-8315-X
DOI: 10.1109/RELPHY.2004.1315449
期刊: 2004 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS
起始頁: 681
結束頁: 682
Appears in Collections:Conferences Paper


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