標題: Ni-P-CNTs nanocomposite film for MEMS applications
作者: Shen, GR
Tsai, LN
Chao, TY
Cheng, YT
Lin, TK
Hsu, WS
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: nanocomposite;carbon nanotube;nickel;electroless plating;electro-thermal microactuator
公開日期: 2004
摘要: A Ni-P-CNTs (electroless phosphorus nickel-carbon nanotubes) nanocomposite film synthesis and related processes for MEMS device fabrication have been successfully developed and presented in this paper. With a special acid oxidative method, a well-dispersed nickel-CNTs colloidal solution has been produced without any aggregation, very suitable for microstructure fabrication. The nano-indentation measurement indicates that the Young's modulus and hardness of the Ni-P-CNTs nanocomposite film plated in the bath with 0.028g/L CNTs can greatly increase up to 666Pa and 29GPa, respectively, which is four times larger than that of pure nickel: The performance improvement of the electro-thermal microactuator made of the nanocomposite, including device strength and power efficient, have been proved similar to the Ni-diamond composites [1]. With the same power input, the device can provide 4 times elongation longer than that made of pure nickel. The mechanical strength of the actuator can also be enhanced to sustain the input power with two times larger than the pure one.
URI: http://hdl.handle.net/11536/18358
ISBN: 0-7803-8536-5
期刊: 2004 4TH IEEE CONFERENCE ON NANOTECHNOLOGY
起始頁: 192
結束頁: 194
Appears in Collections:Conferences Paper