標題: | Microwave coplanar filters on Si substrates |
作者: | Chan, KT Chin, A Kuo, JT Chang, CY Duh, DS Lin, WJ Zhu, CX Li, MF Kwong, DL 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 2003 |
摘要: | High performance band-pass and band-stop microwave coplanar filters operating from 22 to 94 GHz have been realized on Si substrate using proton implantation process. Very good insertion loss and filter characteristics close to ideal E-M simulation are. measured that demonstrates the excellent filter performance to 91 GHz. |
URI: | http://hdl.handle.net/11536/18547 |
ISBN: | 0-7803-7695-1 |
ISSN: | 0149-645X |
期刊: | 2003 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3 |
起始頁: | 1909 |
結束頁: | 1912 |
顯示於類別: | 會議論文 |