Diagnostic techniques for polycrystalline thin film growth

標題:	Diagnostic techniques for polycrystalline thin film growth
作者:	Cheng, KL Cheng, HC Yew, TR 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
公開日期:	1996
URI:	http://hdl.handle.net/11536/19776
ISBN:	1-55899-309-6
ISSN:	0272-9172
期刊:	DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS PROCESSING II
Volume:	406
起始頁:	157
結束頁:	162
Appears in Collections:	Conferences Paper