標題: Diagnostic techniques for polycrystalline thin film growth
作者: Cheng, KL
Cheng, HC
Yew, TR
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1996
URI: http://hdl.handle.net/11536/19776
ISBN: 1-55899-309-6
ISSN: 0272-9172
期刊: DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS PROCESSING II
Volume: 406
起始頁: 157
結束頁: 162
Appears in Collections:Conferences Paper