標題: | Luminescent properties of sol-gel prepared Y3Al5O12:Tb thin films |
作者: | Lo, JR Tseng, TY Tyan, JH Huang, JCM 交大名義發表 電子工程學系及電子研究所 National Chiao Tung University Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1996 |
摘要: | A series of Tb-activated Y3Al5O12 films have been fabricated by spin coating on silicon substrate with sol-gel solutions. The formation of a single garnet phase is observed at 800 degrees C for 1 h in rapid thermal annealing furnace. The emission spectrum of the films induced by ultraviolet(UV) and electron excitations show the D-5 to F-6 transition and consisted of two groups, D-5(3) to F-6(before 485nm) and D-5(4) to 6F(after 485nm). The emission intensities of the films are dependent on the Tb concentrations. |
URI: | http://hdl.handle.net/11536/19901 |
ISBN: | 0-7803-3594-5 |
期刊: | IVMC '96 - 9TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST |
起始頁: | 197 |
結束頁: | 201 |
顯示於類別: | 會議論文 |