Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ku, TK | en_US |
dc.contributor.author | Hsieh, BB | en_US |
dc.contributor.author | Chen, MS | en_US |
dc.contributor.author | Wang, CC | en_US |
dc.contributor.author | Wang, PW | en_US |
dc.contributor.author | Hsieh, IJ | en_US |
dc.contributor.author | Cheng, HC | en_US |
dc.date.accessioned | 2014-12-08T15:27:43Z | - |
dc.date.available | 2014-12-08T15:27:43Z | - |
dc.date.issued | 1995 | en_US |
dc.identifier.isbn | 0-8194-2007-7 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/19968 | - |
dc.identifier.uri | http://dx.doi.org/10.1117/12.220935 | en_US |
dc.language.iso | en_US | en_US |
dc.subject | oxidation sharpening | en_US |
dc.subject | microtips | en_US |
dc.subject | gated field emitter arrays | en_US |
dc.subject | silicon pedestal | en_US |
dc.subject | gate aperture | en_US |
dc.subject | field emission | en_US |
dc.title | Fabrication and characterization of gated Si field emitter arrays with gate aperture below 0.5 mu m | en_US |
dc.type | Proceedings Paper | en_US |
dc.identifier.doi | 10.1117/12.220935 | en_US |
dc.identifier.journal | MICROELECTRONIC STRUCTURES AND MICROELECTROMECHANICAL DEVICES FOR OPTICAL PROCESSING AND MULTIMEDIA APPLICATIONS | en_US |
dc.citation.volume | 2641 | en_US |
dc.citation.spage | 140 | en_US |
dc.citation.epage | 144 | en_US |
dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
dc.identifier.wosnumber | WOS:A1995BE29Y00016 | - |
Appears in Collections: | Conferences Paper |
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