標題: | Direct observation of the lateral nonuniform channel doping profile in submicron MOSFET's from an anomalous charge pumping measurement results |
作者: | Chung, SS Cheng, SM Lee, GH Guo, JC 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1995 |
URI: | http://hdl.handle.net/11536/20048 http://dx.doi.org/10.1109/VLSIT.1995.520878 |
ISBN: | 0-7803-2602-4 |
DOI: | 10.1109/VLSIT.1995.520878 |
期刊: | 1995 SYMPOSIUM ON VLSI TECHNOLOGY: DIGEST OF TECHNICAL PAPERS |
起始頁: | 103 |
結束頁: | 104 |
顯示於類別: | 會議論文 |