Direct observation of the lateral nonuniform channel doping profile in submicron MOSFET's from an anomalous charge pumping measurement results

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A1995BE44J00052.pdf (199.31 KB)

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Authors

DOI

10.1109/VLSIT.1995.520878

URI

http://dx.doi.org/10.1109/VLSIT.1995.520878
https://ir.lib.nycu.edu.tw/handle/11536/20048

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會議論文;;Conferences Paper