Direct observation of the lateral nonuniform channel doping profile in submicron MOSFET's from an anomalous charge pumping measurement results

標題:	Direct observation of the lateral nonuniform channel doping profile in submicron MOSFET's from an anomalous charge pumping measurement results
作者:	Chung, SS Cheng, SM Lee, GH Guo, JC 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
公開日期:	1995
URI:	http://hdl.handle.net/11536/20048 http://dx.doi.org/10.1109/VLSIT.1995.520878
ISBN:	0-7803-2602-4
DOI:	10.1109/VLSIT.1995.520878
期刊:	1995 SYMPOSIUM ON VLSI TECHNOLOGY: DIGEST OF TECHNICAL PAPERS
起始頁:	103
結束頁:	104
Appears in Collections:	Conferences Paper

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