FABRICATION AND CHARACTERISTICS OF RF MAGNETRON-SPUTTERED ITO THIN-FILMS

標題:	FABRICATION AND CHARACTERISTICS OF RF MAGNETRON-SPUTTERED ITO THIN-FILMS
作者:	WU, WF CHIOU, BS 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
公開日期:	1994
URI:	http://hdl.handle.net/11536/20081 http://dx.doi.org/10.1117/12.175003
ISBN:	0-8194-1445-X
DOI:	10.1117/12.175003
期刊:	DESIGN, SIMULATION, AND FABRICATION OF OPTOELECTRONIC DEVICES AND CIRCUITS
Volume:	2150
起始頁:	319
結束頁:	325
Appears in Collections:	Conferences Paper

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