标题: | FABRICATION AND CHARACTERISTICS OF RF MAGNETRON-SPUTTERED ITO THIN-FILMS |
作者: | WU, WF CHIOU, BS 电子工程学系及电子研究所 Department of Electronics Engineering and Institute of Electronics |
公开日期: | 1994 |
URI: | http://hdl.handle.net/11536/20081 http://dx.doi.org/10.1117/12.175003 |
ISBN: | 0-8194-1445-X |
DOI: | 10.1117/12.175003 |
期刊: | DESIGN, SIMULATION, AND FABRICATION OF OPTOELECTRONIC DEVICES AND CIRCUITS |
Volume: | 2150 |
起始页: | 319 |
结束页: | 325 |
显示于类别: | Conferences Paper |
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