Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Liou, C. H.	en_US
dc.contributor.author	Chiu, Y.	en_US
dc.contributor.author	Shieh, H. P. D.	en_US
dc.contributor.author	Chiou, J. C.	en_US
dc.date.accessioned	2014-12-08T15:28:05Z	-
dc.date.available	2014-12-08T15:28:05Z	-
dc.date.issued	2012	en_US
dc.identifier.isbn	978-1-4577-1513-6	en_US
dc.identifier.uri	http://hdl.handle.net/11536/20346	-
dc.description.abstract	A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.	en_US
dc.language.iso	en_US	en_US
dc.subject	near-field scanning optical microscope	en_US
dc.subject	CMOS-MEMS	en_US
dc.subject	photodetector	en_US
dc.subject	side photodetector	en_US
dc.subject	transimpedance amplifier	en_US
dc.title	Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.journal	2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)	en_US
dc.citation.spage	168	en_US
dc.citation.epage	169	en_US
dc.contributor.department	電機資訊學士班	zh_TW
dc.contributor.department	Undergraduate Honors Program of Electrical Engineering and Computer Science	en_US
dc.identifier.wosnumber	WOS:000309942400080	-
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