INHIBITION OF BIRDS BEAK IN LOCOS BY NEW BUFFER N2O OXIDE

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DC Field	Value	Language
dc.contributor.author	CHAO, TS	en_US
dc.contributor.author	CHENG, JY	en_US
dc.contributor.author	LEI, TF	en_US
dc.date.accessioned	2014-12-08T15:03:31Z	-
dc.date.available	2014-12-08T15:03:31Z	-
dc.date.issued	1995-02-16	en_US
dc.identifier.issn	0013-5194	en_US
dc.identifier.uri	http://dx.doi.org/10.1049/el:19950208	en_US
dc.identifier.uri	http://hdl.handle.net/11536/2047	-
dc.description.abstract	In the Letter new N2O buffer oxide was used to replace the conventional dry oxide for LOGOS isolation. This new structure can result in a shorter bird's beak than the conventional structure without adding extra steps and inducing the defect in silicon substrate.	en_US
dc.language.iso	en_US	en_US
dc.subject	SILICON	en_US
dc.subject	OXIDATION	en_US
dc.title	INHIBITION OF BIRDS BEAK IN LOCOS BY NEW BUFFER N2O OXIDE	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1049/el:19950208	en_US
dc.identifier.journal	ELECTRONICS LETTERS	en_US
dc.citation.volume	31	en_US
dc.citation.issue	4	en_US
dc.citation.spage	323	en_US
dc.citation.epage	324	en_US
dc.contributor.department	電子工程學系及電子研究所	zh_TW
dc.contributor.department	Department of Electronics Engineering and Institute of Electronics	en_US
dc.identifier.wosnumber	WOS:A1995QL56400057	-
dc.citation.woscount	0	-
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