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dc.contributor.authorYang, Shih-Weien_US
dc.contributor.authorLin, Chern-Shengen_US
dc.contributor.authorLin, Shir-Kuanen_US
dc.date.accessioned2014-12-08T15:29:23Z-
dc.date.available2014-12-08T15:29:23Z-
dc.date.issued2013-04-01en_US
dc.identifier.issn0143-8166en_US
dc.identifier.urihttp://dx.doi.org/10.1016/j.optlaseng.2012.12.004en_US
dc.identifier.urihttp://hdl.handle.net/11536/21165-
dc.description.abstractIn this paper, an automatic optical inspection system for the 3D surface profile of an unsymmetrical microstructure using Fizeau interferometer was proposed. This non-contact optical inspection system is suitable for measuring the lens sag and 3D surface profile of symmetrical and unsymmetrical microlenses. Referring to the unsymmetrical microlenses as an example, the distribution of the interference fringes is partly dense and partly rare, and is completely different from the equally dense distribution of symmetrical microlenses. Thus, a novel algorithm is proposed to solve the above mentioned problem in this paper, namely, individually determining the darkest points of the dark fringes and the brightest points of the bright fringes, and fitting these discrete points as close curves through the Bezier curve theory. As the contour lines of an unsymmetrical microlens are obtained, the 3D surface profile of the unsymmetrical microlens can be plotted correspondingly. Furthermore, the proposed system has the following advantages due to its non-contact structure. This system is specifically designed for in-line measurements according to the rapid inspection speed; it has no need to coat a reflective layer on the inspected microstructure, thus avoiding damaging the surface structure of the sample. (C) 2012 Elsevier Ltd. All rights reserved.en_US
dc.language.isoen_USen_US
dc.subject3D surface profileen_US
dc.subjectUnsymmetrical microstructureen_US
dc.subjectFizeau interferometeren_US
dc.subjectBezier curveen_US
dc.title3D surface profile measurement of unsymmetrical microstructure using Fizeau interferometric microscopeen_US
dc.typeArticleen_US
dc.identifier.doi10.1016/j.optlaseng.2012.12.004en_US
dc.identifier.journalOPTICS AND LASERS IN ENGINEERINGen_US
dc.citation.volume51en_US
dc.citation.issue4en_US
dc.citation.spage348en_US
dc.citation.epage357en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:000314860500003-
dc.citation.woscount5-
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