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dc.contributor.authorChuang, Chun-Ien_US
dc.contributor.authorLin, Shiuan-Hueien_US
dc.contributor.authorChao, Yu-Fayeen_US
dc.date.accessioned2014-12-08T15:30:11Z-
dc.date.available2014-12-08T15:30:11Z-
dc.date.issued2013-07-01en_US
dc.identifier.issn0143-8166en_US
dc.identifier.urihttp://dx.doi.org/10.1016/j.optlaseng.2013.02.004en_US
dc.identifier.urihttp://hdl.handle.net/11536/21630-
dc.description.abstractAn improved phase modulated technique has been implemented to increase the speed and accuracy of optical parameters extraction for a uniaxial bulk media. In combination of the genetic algorithm, we show that not only the complex refractive indices, the inclination and azimuth angles of optical axis can also be extracted. Furthermore, by using a two-probe-beam configuration, the speed of convergence can be improved by 5-times. Such a high speed and accurate method can be applied for the in-situ measurement of dynamic materials. (C) 2013 Elsevier Ltd. All rights reserved.en_US
dc.language.isoen_USen_US
dc.subjectUniaxialen_US
dc.subjectPhase modulated ellipsometryen_US
dc.subjectGenetic algorithmen_US
dc.subjectRefractive indexen_US
dc.subjectOrientation of optical axisen_US
dc.titleRapid and accurate extraction of optical parameters for uniaxial bulk media by phase modulated ellipsometryen_US
dc.typeArticleen_US
dc.identifier.doi10.1016/j.optlaseng.2013.02.004en_US
dc.identifier.journalOPTICS AND LASERS IN ENGINEERINGen_US
dc.citation.volume51en_US
dc.citation.issue7en_US
dc.citation.spage861en_US
dc.citation.epage866en_US
dc.contributor.department電子物理學系zh_TW
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentDepartment of Electrophysicsen_US
dc.contributor.departmentDepartment of Photonicsen_US
dc.identifier.wosnumberWOS:000317888200010-
dc.citation.woscount0-
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