標題: | Improved light reflectance and thermal stability of Ag-based ohmic contacts on p-type GaN with La additive |
作者: | Chen, I-Chen Cheng, Bo-Yuan Ke, Wen-Cheng Kuo, Cheng-Huang Chang, Li-Chuan 照明與能源光電研究所 Institute of Lighting and Energy Photonics |
關鍵字: | Ohmic contact;La additive;Light reflectance;Specific contact resistivity |
公開日期: | 1-May-2013 |
摘要: | We investigated the effect of La additive on the improvement of light reflectance and thermal stability of Ag contacts on p-GaN. A high reflectance of over 90% at 460 nm wavelength and low specific contact resistivity of 5.5 x 10(-5) Omega cm(2) were obtained from La-containing Ag contacts annealed at 300 degrees C for 1 min, which also show better thermal stability than Ag contacts after annealing in air ambient. The experimental results reveal that the addition of La could effectively slow down Ag migration in < 1 1 1 > direction during annealing, and thus suppress the Ag agglomeration at elevated temperature, leading to a good ohmic contact with improved high reflectance and thermal stability. (C) 2013 Elsevier Ltd. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.spmi.2013.02.002 http://hdl.handle.net/11536/21913 |
ISSN: | 0749-6036 |
DOI: | 10.1016/j.spmi.2013.02.002 |
期刊: | SUPERLATTICES AND MICROSTRUCTURES |
Volume: | 57 |
Issue: | |
起始頁: | 51 |
結束頁: | 57 |
Appears in Collections: | Articles |
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