標題: | Evolution of Bottom c-Plane on Wet-Etched Patterned Sapphire Substrate |
作者: | Chen, Chien-Chih Hsiao, Feng Ching Lin, Bo-Wen Hsu, Wen-Ching Wu, YewChung Sermon 材料科學與工程學系 Department of Materials Science and Engineering |
公開日期: | 2013 |
摘要: | Wet-etched pattern sapphire substrate (PSS) has been employed to improve the epitaxy of GaN-based LEDs. It was found that the crystal quality and performance of LEDs improved with decrease in c-plane areas of PSS. However, further decrease in bottom c-plane areas makes epitaxy of GaN film very difficult. In this research, the evolution of bottom c-plane was investigated through a systematic study. It was found that epitaxy difficulty might be due to the appearance of 6C facets {4 (1) over bar(3) over bar 18} and the disappearance of bottom c-plane. (C) 2013 The Electrochemical Society. |
URI: | http://hdl.handle.net/11536/22435 http://dx.doi.org/10.1149/2.022309jss |
ISSN: | 2162-8769 |
DOI: | 10.1149/2.022309jss |
期刊: | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY |
Volume: | 2 |
Issue: | 9 |
起始頁: | R169 |
結束頁: | R171 |
顯示於類別: | 期刊論文 |