標題: GROWTH PARAMETER EFFECT IN SUPERCONDUCTING YBA2CU4O8 THIN-FILMS BY DC MAGNETRON SPUTTERING
作者: WU, SC
HSU, HT
CHEN, FH
CHANG, WR
TSENG, TY
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-十一月-1994
摘要: High-T-c YBa2Cu4O8 (124) thin films have been made by d.c. magnetron sputtering deposition on (100) MgO substrates. The effect of several processing variables, including the ratio of oxygen to argon, total pressure, and substrate temperature, on the superconducting properties of the thin films, were systematically investigated. The as-prepared films annealed in flowing oxygen at 800 degrees C for 4 h under ambient pressure obtained nearly phase-pure 124 and exhibited superconducting onset transition at 75 K.
URI: http://dx.doi.org/10.1007/BF00349952
http://hdl.handle.net/11536/2256
ISSN: 0022-2461
DOI: 10.1007/BF00349952
期刊: JOURNAL OF MATERIALS SCIENCE
Volume: 29
Issue: 21
起始頁: 5593
結束頁: 5598
顯示於類別:期刊論文