標題: THE CHEMICAL STAIN INSPECTION OF POLYSILICON SOLAR CELL WAFER BY THE FUZZY THEORY METHOD
作者: Lin, Chern-Sheng
Lin, Chih-Wei
Yang, Shih-Wei
Lin, Shir-Kuan
Chiu, Chuang-Chien
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: Solar wafer;Laser-reflection-point based AOI method;Chemical stain inspection;Fuzzy theory;Back-propagation;Image binarization algorithm;Stain recognition
公開日期: 1-Aug-2013
摘要: This study proposed an automatic optical inspection (AOI) technique to improve the inspection of chemical stains on solar wafers. Poly-silicon solar cell wafers were inspected for chemical stains, and the inspection was rapid and stable. The system used a laser-reflection-point-based AOI method for solar wafer chemical stain inspection. Based on the fuzzy theory, the image binarization algorithm could efficiently filter irrelevant image information, and the back-propagation method was also utilized to determine if the image was stained. The inspection algorithm integrated fuzzy theory and the back-propagation method in order to shorten the comparison time and quickly find the target. The experiment proved that the validity of the proposed method could achieve a recognition rate of 98% from among 1000 images.
URI: http://dx.doi.org/10.1080/10798587.2013.778052
http://hdl.handle.net/11536/23048
ISSN: 1079-8587
DOI: 10.1080/10798587.2013.778052
期刊: INTELLIGENT AUTOMATION AND SOFT COMPUTING
Volume: 19
Issue: 3
起始頁: 391
結束頁: 406
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