標題: LOW-TEMPERATURE EPITAXY OF GAAS BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION
作者: CHEN, WK
CHANG, CS
CHEN, WC
電子物理學系
光電工程學系
Department of Electrophysics
Department of Photonics
關鍵字: LOW-TEMPERATURE EPITAXY;GAAS;MOCVD
公開日期: 1-Aug-1994
摘要: The low-temperature (LT) epitaxial growth of high quality GaAs films is achieved by using triethylgallium and tertiarybutylarsine as the precursors. Without any external work, the deposition can be conducted at a temperature as low as 350-degrees-C in a conventional metalorganic chemical vapor deposition system. The full width at half-maximum of 77 K photoluminescence and X-ray rocking curve for a sample grown at 425-degrees-C are 8.2 meV and 14 arcsec, respectively. Materials with good electrical properties were also obtained. A Schottky diode formed on the LT CaAs epilayer shows a barrier height of 0.83 eV, and a reverse saturation current of 1.1 X 10(-7) A/cm2, comparable to that of a normal GaAs Schottky diode.
URI: http://hdl.handle.net/11536/2393
ISSN: 0021-4922
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
Volume: 33
Issue: 8A
起始頁: L1052
結束頁: L1055
Appears in Collections:Articles