Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Vol 447, pg 516, 2004)

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Chang, TC	en_US
dc.contributor.author	Yan, ST	en_US
dc.contributor.author	Liu, PT	en_US
dc.contributor.author	Lin, ZW	en_US
dc.contributor.author	Aoki, H	en_US
dc.contributor.author	Sze, SM	en_US
dc.date.accessioned	2014-12-08T15:37:17Z	-
dc.date.available	2014-12-08T15:37:17Z	-
dc.date.issued	2004-11-22	en_US
dc.identifier.issn	0040-6090	en_US
dc.identifier.uri	http://dx.doi.org/10.1016/j.tsf.2004.05.002	en_US
dc.identifier.uri	http://hdl.handle.net/11536/25630	-
dc.language.iso	en_US	en_US
dc.title	Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Vol 447, pg 516, 2004)	en_US
dc.type	Correction	en_US
dc.identifier.doi	10.1016/j.tsf.2004.05.002	en_US
dc.identifier.journal	THIN SOLID FILMS	en_US
dc.citation.volume	467	en_US
dc.citation.issue	1-2	en_US
dc.citation.spage	342	en_US
dc.citation.epage	342	en_US
dc.contributor.department	電子工程學系及電子研究所	zh_TW
dc.contributor.department	Department of Electronics Engineering and Institute of Electronics	en_US
dc.identifier.wosnumber	WOS:000224185100055	-
dc.citation.woscount	0	-
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