標題: | Enhancing the overwriting characteristics of phase-change optical disks by doping in dielectric layers |
作者: | Yu, CH Hsieh, TE Yeh, TT Shieh, HPD 材料科學與工程學系 光電工程學系 Department of Materials Science and Engineering Department of Photonics |
關鍵字: | overwriting characteristics;cycleability;phase-change optical disk;doping;dielectric layer |
公開日期: | 1-Sep-2004 |
摘要: | In this work, we studied the enhancement of overwriting characteristics of phase-change optical disks by doping in the dielectric layers. The doping elements included chromium (Cr), molybdenum (Mo), nickel (Ni), tantalum (Ta), titanium (Ti), tungsten (W), vanadium (V), and nitrogen (N-2) Dynamic test showed that doping with a certain amount of W and N-2 in dielectric layers enhanced the disk overwriting characteristics. Up to fortyfold improvement in disk cycleability was observed when N-2 gas was introduced during sputtering deposition of the upper dielectric layer at the gas flow rate of N-2/Ar = 25%. Tungsten was the best among the doping metallic elements resulting in fivefold improvement in disk cycleability. Optical property measurement revealed that the refractive index (n) decreased with increasing N-2 doping percentage, while the relatively small amount of metallic element doping negligibly changed the optical constants. Subsequent modulation simulation showed that such an optical property change is beneficial to disk overwriting characteristics. Nanoindentation test showed that N-2 doping was the most effective method for increasing the hardness of the dielectric layer. This implies that, with increasing mechanical strength, the dielectric layer possesses better resistance to thermal deformation resulting from laser heating, thereby enhancing the cycleability of optical disks. |
URI: | http://dx.doi.org/10.1143/JJAP.43.6129 http://hdl.handle.net/11536/26441 |
ISSN: | 0021-4922 |
DOI: | 10.1143/JJAP.43.6129 |
期刊: | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS |
Volume: | 43 |
Issue: | 9A |
起始頁: | 6129 |
結束頁: | 6133 |
Appears in Collections: | Articles |
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