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dc.contributor.authorYeh, YMen_US
dc.contributor.authorTu, GCen_US
dc.contributor.authorFu, MNen_US
dc.date.accessioned2014-12-08T15:40:15Z-
dc.date.available2014-12-08T15:40:15Z-
dc.date.issued2003-10-01en_US
dc.identifier.issn0021-4922en_US
dc.identifier.urihttp://hdl.handle.net/11536/27483-
dc.description.abstractUV (ultra violet)-LIGA (a German acronym for lithographic, gavanoformung, abformung), a low-cost microcomponent manufacturing technology for micro-electromechanical systems (MEMS), combines the UV patterning of thick photoresist layers with the molding of the resulting patterns by electroforming. It enables mass production of microcomponents using microinjection molding or hot embossing technology. This paper addresses the characteristics of the flow field and the mass transfer effect during micro-electroforming processes. A micro-electroforming experiment is conducted and a simulation is performed to determine optimal conditions for fine surface forming by micro-electroforming. Results show that a smaller diameter of a hole corresponds to poorer plating bath transfer. Plating bath can be replenished by increasing the rotation speed of the electrodes. However, mass transfer is still limited in holes with a high aspect ratio. The theoretical results of simulation analysis were verified by conducting practical electroforming experiments.en_US
dc.language.isoen_USen_US
dc.subjectUV-LIGAen_US
dc.subjectelectroformingen_US
dc.subjectmass transfer effecten_US
dc.subjectNi-Feen_US
dc.subjectmold inserten_US
dc.titleSimulation analysis and experimental verification of UV-LIGA process for high-aspect-ratio Ni-Fe micro-mold inserten_US
dc.typeArticleen_US
dc.identifier.journalJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERSen_US
dc.citation.volume42en_US
dc.citation.issue10en_US
dc.citation.spage6683en_US
dc.citation.epage6690en_US
dc.contributor.department材料科學與工程學系zh_TW
dc.contributor.departmentDepartment of Materials Science and Engineeringen_US
dc.identifier.wosnumberWOS:000186948400088-
dc.citation.woscount4-
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