標題: A simulated annealing algorithm for integration of shop floor control strategies in semiconductor wafer fabrication
作者: Sha, DY
Liu, CY
工業工程與管理學系
Department of Industrial Engineering and Management
關鍵字: shop floor control;dispatching;order review and release;rework;wafer fabrication;simulation;simulated annealing
公開日期: 1-Sep-2003
摘要: The semiconductor manufacturing industry is one of the most important industries in Taiwan. Wafer fabrication is an essential process in semiconductor manufacturing. However, controlling the production system on the shop floor is extremely difficult owing to the complicated manufacturing process and reentrant characteristics. In this paper, the shop floor control (SFC) integration strategies (order review/release, dispatching, and rework strategies) in wafer fabrication are considered with using several performances. We reviewed the literature on SFC strategies in wafer fabrication. The proposed combination simulation and simulated annealing (SA) algorithm is presented for SFC strategies in wafer fabrication. The objective was to seek the near global optimum solution for the combination of SFC strategies for a specific performance indicator. From the results, the proposed methodology was found to perform well for combinations of SFC strategies using different performance indicators in wafer fabrication. However, no single combination of SFC strategies could satisfy all performance indicators. Hence, considering the trade-off among these production control strategies, a suitable strategy should be chosen based on the system control tactics. Considerable computational time was saved in this research.
URI: http://dx.doi.org/10.1007/s00170-002-1444-6
http://hdl.handle.net/11536/27571
ISSN: 0268-3768
DOI: 10.1007/s00170-002-1444-6
期刊: INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume: 22
Issue: 1-2
起始頁: 75
結束頁: 88
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