標題: | INVESTIGATION OF SI-SIO2 INTERFACE PROPERTIES FOR BONDED SILICON-ON-INSULATOR |
作者: | YEH, CF KAO, HW CHANG, BS CHANG, KL 交大名義發表 電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering |
公開日期: | 1-Oct-1993 |
URI: | http://hdl.handle.net/11536/2846 |
ISSN: | 0261-8028 |
期刊: | JOURNAL OF MATERIALS SCIENCE LETTERS |
Volume: | 12 |
Issue: | 19 |
起始頁: | 1506 |
結束頁: | 1507 |
Appears in Collections: | Articles |