Determination of ultrathin oxide thickness by subthreshold swing

標題:	Determination of ultrathin oxide thickness by subthreshold swing
作者:	Cha, TS 電子物理學系 Department of Electrophysics
關鍵字:	oxide;subthreshold swing;N2O;thickness
公開日期:	1-五月-2002
摘要:	Thickness determination of ultrathin oxide by the subthreshold swing has bee developed. From the experimental result, oxide thickness in the range of 3.0-5.3 nm exhibits a linear dependence on the subthreshold swing. We found that this dependence is also valid for oxide grown in N2O or O-2.
URI:	http://dx.doi.org/10.1143/JJAP.41.2904 http://hdl.handle.net/11536/28834
ISSN:	0021-4922
DOI:	10.1143/JJAP.41.2904
期刊:	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume:	41
Issue:	5A
起始頁:	2904
結束頁:	2905
顯示於類別：	期刊論文

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