標題: | Determination of ultrathin oxide thickness by subthreshold swing |
作者: | Cha, TS 電子物理學系 Department of Electrophysics |
關鍵字: | oxide;subthreshold swing;N2O;thickness |
公開日期: | 1-五月-2002 |
摘要: | Thickness determination of ultrathin oxide by the subthreshold swing has bee developed. From the experimental result, oxide thickness in the range of 3.0-5.3 nm exhibits a linear dependence on the subthreshold swing. We found that this dependence is also valid for oxide grown in N2O or O-2. |
URI: | http://dx.doi.org/10.1143/JJAP.41.2904 http://hdl.handle.net/11536/28834 |
ISSN: | 0021-4922 |
DOI: | 10.1143/JJAP.41.2904 |
期刊: | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS |
Volume: | 41 |
Issue: | 5A |
起始頁: | 2904 |
結束頁: | 2905 |
顯示於類別: | 期刊論文 |