標題: Metalorganic chemical vapor deposition of tungsten carbonitride films by bis(tertbutylimido)bis(diethylamido)tungsten.
作者: Chuang, SH
Chiu, HT
Chou, YH
Chang, YH
Chen, SF
Yang, JY
應用化學系
Department of Applied Chemistry
公開日期: 7-Apr-2002
URI: http://hdl.handle.net/11536/28866
ISSN: 0065-7727
期刊: ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Volume: 223
Issue: 
起始頁: A48
結束頁: A48
Appears in Collections:Articles