Diamond deposition on Si (111) and carbon face 6H-SiC (0001) substrates by positively biased pretreatment

Abstract

The growth of textured diamond films on Si (111) and carbon face 6H-SiC (0001) has been achieved by positive bias-enhanced-nucleation in microwave plasma chemical vapor deposition. A bias voltage of + 100 to +300 V, 3% CH4 concentration in bias step, and 0.33% CH4 concentration in growth step were used to synthesize diamond films on Si and carbon face 6H-SiC. Highly oriented diamond films were observed by scanning electron microscopy and X-ray diffraction patterns. Cross-sectional transmission electron microscopy showed that the interface between diamond and Si substrate was smooth, while it was rough between diamond and SiC. It also showed that diamond films were directly grown on both substrates. (C) 2002 Elsevier Science B.V. All lights reserved.