標題: | Application of on-wafer TRL calibration on the measurement of microwave properties of Ba0.5Sr0.5TiO3 thin films |
作者: | Lue, HT Tseng, TY 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1-十一月-2001 |
摘要: | A series of Al/Ba0.5Sr0.5TiO3 (BST)/sapphire multi-layered coplanar waveguide (CPW) transmission lines of different geometries and thin-film configurations was fabricated. We employed an accurate on-wafer Through-Line-Reflect (TRL) calibration technique and quasi-TEM analysis to measure the dielectric constant, loss tangent, and tunability of BST thin films using this CPW structure. Experimental results show that the overall insertion loss is less than 3 dB/cm even at frequencies as high as 20 GHz, which is the lowest obtained to date for metal/BST CPW devices. This result indicates that, with optimized impedance matching, normal conductors are also possibly suitable for fabricating low-loss tunable phase-shifter devices. |
URI: | http://dx.doi.org/10.1109/58.971716 http://hdl.handle.net/11536/29270 |
ISSN: | 0885-3010 |
DOI: | 10.1109/58.971716 |
期刊: | IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL |
Volume: | 48 |
Issue: | 6 |
起始頁: | 1640 |
結束頁: | 1647 |
顯示於類別: | 期刊論文 |