標題: Application of on-wafer TRL calibration on the measurement of microwave properties of Ba0.5Sr0.5TiO3 thin films
作者: Lue, HT
Tseng, TY
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-十一月-2001
摘要: A series of Al/Ba0.5Sr0.5TiO3 (BST)/sapphire multi-layered coplanar waveguide (CPW) transmission lines of different geometries and thin-film configurations was fabricated. We employed an accurate on-wafer Through-Line-Reflect (TRL) calibration technique and quasi-TEM analysis to measure the dielectric constant, loss tangent, and tunability of BST thin films using this CPW structure. Experimental results show that the overall insertion loss is less than 3 dB/cm even at frequencies as high as 20 GHz, which is the lowest obtained to date for metal/BST CPW devices. This result indicates that, with optimized impedance matching, normal conductors are also possibly suitable for fabricating low-loss tunable phase-shifter devices.
URI: http://dx.doi.org/10.1109/58.971716
http://hdl.handle.net/11536/29270
ISSN: 0885-3010
DOI: 10.1109/58.971716
期刊: IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume: 48
Issue: 6
起始頁: 1640
結束頁: 1647
顯示於類別:期刊論文


文件中的檔案:

  1. 000172684300018.pdf

若為 zip 檔案,請下載檔案解壓縮後,用瀏覽器開啟資料夾中的 index.html 瀏覽全文。