Assembly of Micro Mirrors on SOI Wafers Using SU-8 Mechanisms and One-Push Operation

Full metadata record

DC Field	Value	Language
dc.contributor.author	Chiu, Yi	en_US
dc.contributor.author	Huang, Wei-Zhi	en_US
dc.contributor.author	Wu, Jhong-Wei	en_US
dc.contributor.author	Chiou, Jin-Chem	en_US
dc.contributor.author	Shieh, Han-Ping D.	en_US
dc.date.accessioned	2014-12-08T15:04:26Z	-
dc.date.available	2014-12-08T15:04:26Z	-
dc.date.issued	2008	en_US
dc.identifier.isbn	978-1-4244-1917-3	en_US
dc.identifier.uri	http://hdl.handle.net/11536/2941	-
dc.description.abstract	Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.	en_US
dc.language.iso	en_US	en_US
dc.title	Assembly of Micro Mirrors on SOI Wafers Using SU-8 Mechanisms and One-Push Operation	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.journal	2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS	en_US
dc.citation.spage	110	en_US
dc.citation.epage	111	en_US
dc.contributor.department	電控工程研究所	zh_TW
dc.contributor.department	Institute of Electrical and Control Engineering	en_US
dc.identifier.wosnumber	WOS:000264556700056	-
Appears in Collections:	Conferences Paper