完整後設資料紀錄
DC 欄位語言
dc.contributor.authorChiu, Yien_US
dc.contributor.authorHuang, Wei-Zhien_US
dc.contributor.authorWu, Jhong-Weien_US
dc.contributor.authorChiou, Jin-Chemen_US
dc.contributor.authorShieh, Han-Ping D.en_US
dc.date.accessioned2014-12-08T15:04:26Z-
dc.date.available2014-12-08T15:04:26Z-
dc.date.issued2008en_US
dc.identifier.isbn978-1-4244-1917-3en_US
dc.identifier.urihttp://hdl.handle.net/11536/2941-
dc.description.abstractMicro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.en_US
dc.language.isoen_USen_US
dc.titleAssembly of Micro Mirrors on SOI Wafers Using SU-8 Mechanisms and One-Push Operationen_US
dc.typeProceedings Paperen_US
dc.identifier.journal2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICSen_US
dc.citation.spage110en_US
dc.citation.epage111en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:000264556700056-
顯示於類別:會議論文