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dc.contributor.authorLin, Jon-Hongen_US
dc.contributor.authorKao, Yao-Huangen_US
dc.date.accessioned2014-12-08T15:04:37Z-
dc.date.available2014-12-08T15:04:37Z-
dc.date.issued2008en_US
dc.identifier.isbn978-1-4244-2428-3en_US
dc.identifier.issn1051-0117en_US
dc.identifier.urihttp://hdl.handle.net/11536/3118-
dc.identifier.urihttp://dx.doi.org/10.1109/ULTSYM.2008.0547en_US
dc.description.abstractThe lifetime of active RFID tag is limited by the equipped battery capacity. A passive RFID tag which gathers power via inductive coupling from RF power for temperature sensing was proposed to extend the lifetime of the tag. An oscillator with film bulk acoustic resonator (FBAR) ties at the heart of the tag. A four-layered FBAR with Al/AlN/SiN(x)/Au composite structure was fabricated. The oscillation frequency of the oscillator varies with the temperature linearly. The temperature can be detected easily by measuring the shift of oscillation frequency. The measured phase noise of the oscillator is -75dBc/Hz at 10 kHz offset. A linear temperature sensitivity of -34.5 ppm/degrees C in the temperature range from 10 and 80 degrees C at 2.48 GHz is achieved.en_US
dc.language.isoen_USen_US
dc.subjectRFIDen_US
dc.subjectTemperature Sensingen_US
dc.subjectFBARen_US
dc.subjectAlNen_US
dc.titleWireless Temperature Sensing using a Passive RFID Tag with Film Bulk Acoustic Resonatoren_US
dc.typeProceedings Paperen_US
dc.identifier.doi10.1109/ULTSYM.2008.0547en_US
dc.identifier.journal2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIXen_US
dc.citation.spage2209en_US
dc.citation.epage2212en_US
dc.contributor.department電信工程研究所zh_TW
dc.contributor.departmentInstitute of Communications Engineeringen_US
dc.identifier.wosnumberWOS:000268845801138-
Appears in Collections:Conferences Paper


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