標題: Formation and Structural Characterization of Cobalt Titanate Thin Films
作者: Chuang, Shiow-Huey
Gao, Reui-Hong
Gao, Kuo-Hsing
Chiang, Michael Y.
Chao, Tien-Sheng
電子物理學系
Department of Electrophysics
關鍵字: Cobalt titanate;CoTiO(3);Sol-like precursor;Spin coating;Thin films
公開日期: 1-Oct-2010
摘要: This research successfully produces high quality cobalt titanate (CoTiO(3)) thin films, a high-k material for gate dielectrics, on SiO(2)/Si(100) substrates via a spin-coating method with a sol-like precursor solution. This study prepares the precursor solution by reactions of cobalt acetate and titanium isopropoxide in 2-methoxyethanol. The current work obtains CoTiO(3) thin films after spin coating followed by post-treatment with air under 550 similar to 650 degrees C. A scanning electron microscope, determines film thickness and morphology and X-ray diffraction identifies material structures. This study uses X-ray photoelectron spectroscopy to analyze both elemental compositions and chemical bonding characters of the thin films. This work also investigates reaction pathways.
URI: http://hdl.handle.net/11536/32091
ISSN: 0009-4536
期刊: JOURNAL OF THE CHINESE CHEMICAL SOCIETY
Volume: 57
Issue: 5A
起始頁: 1022
結束頁: 1026
Appears in Collections:Articles