Design and simulation of a MEMS high G inertial impact sensor

Abstract

Conventional inertial impact sensors typically use mechanisms such as cantilever beams or axial springs as triggering devices. Reaction time for these conventional impact sensors are either far too slow or, in many cases, fail to function completely for high G applications. In this study, a MEMS high G inertial impact sensor with a measurement range of 8,000-21,000 G is presented. The triggering mechanism is a combination of cantilever and spring structure. The design of the mechanism underwent a series of analyses. Simulation results indicated that a MEMS high G inertial impact sensor has a faster reaction time than conventional G inertial impact sensors that use a cantilever beam or spring mechanism. Furthermore, the MEMS high G inertial impact sensor is sufficiently robust to survive the impact encountered in high G application where most conventional G inertial impact sensors fail.