標題: | Evaluating the abrasive wear of Zn(1-x)Mn(x)O heteroepitaxial layers using a nanoscratch technique |
作者: | Chang, Yu-Ming Wen, Hua-Chiang Yang, Chu-Shou Lian, Derming Tsai, Chien-Huang Wang, Jyh-Shyang Wu, Wen-Fa Chou, Chang-Pin 機械工程學系 Department of Mechanical Engineering |
公開日期: | 1-八月-2010 |
摘要: | In this study, we used nanoscratch techniques under a ramping load to evaluate the abrasive wear of Zn(1-x)Mn(x)O epilayers (0 <= x <= 0.16) grown through molecular beam epitaxy (MBE) on sapphire substrates. We analyzed the surface roughness and damage using atomic force microscopy (AFM) and nano-indenter techniques. The scratched surfaces of the Zn(1-x)Mn(x)O epilayers were significantly different for the various Mn compositions. AFM imaging of the Zn(1-x)Mn(x)O films revealed that pileup phenomena were important on both sides of each scratch. During the scratching process, we found that cracking dominated in the case of Zn(1-x)Mn(x)O films while ploughing; also we observed lower values of the coefficient of friction and shallower penetration depths for the films upon increasing the Mn content (x) from 0 to 0.16, suggesting that higher Mn contents provided the Zn(1-x)Mn(x)O epilayers with higher shear resistances, enhanced by the presence of MnO bonds. (C) 2010 Elsevier Ltd. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.microrel.2010.05.003 http://hdl.handle.net/11536/32345 |
ISSN: | 0026-2714 |
DOI: | 10.1016/j.microrel.2010.05.003 |
期刊: | MICROELECTRONICS RELIABILITY |
Volume: | 50 |
Issue: | 8 |
起始頁: | 1111 |
結束頁: | 1115 |
顯示於類別: | 期刊論文 |