標題: Efficient chip counting system with a modified scanner
作者: Lee, TS
Shie, JS
光電工程學系
Department of Photonics
關鍵字: optical counting;scanner;semiconductor dice
公開日期: 1-Sep-1998
摘要: A low-cost imaging system capable of recognizing and counting semiconductor good dice is designed and is proven experimentally to be effective. The system utilizes a commercial scanner with the least modification of its inner optics by a beamsplitter-insertion method. Patterns on specular die surfaces therefore can be grabbed clearly, which results in the marks on defective dice being distinguishable. Also, a mask algorithm is developed to count the good dice on an adhesive tape, according to the gray-level histogram and the converted binary picture of the scanned image. The built-in software associated with the scanner, which is reliable and user-friendly, can also be incorporated into the designated algorithm without paying an additional price for system development, (C) 1998 Society of Photo-Optical Instrumentation Engineers.
URI: http://hdl.handle.net/11536/32435
ISSN: 0091-3286
期刊: OPTICAL ENGINEERING
Volume: 37
Issue: 9
起始頁: 2543
結束頁: 2549
Appears in Collections:Articles


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