Parameter extraction of resistive thermal microsensors by AC electrical method

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DC 欄位	值	語言
dc.contributor.author	Ou-Yang, M	en_US
dc.contributor.author	Sheen, CS	en_US
dc.contributor.author	Shie, JS	en_US
dc.date.accessioned	2014-12-08T15:49:13Z	-
dc.date.available	2014-12-08T15:49:13Z	-
dc.date.issued	1998-04-01	en_US
dc.identifier.issn	0018-9456	en_US
dc.identifier.uri	http://hdl.handle.net/11536/32709	-
dc.description.abstract	Obtaining device parameters of thermal microsensors is essential for evaluating their performances and simulation modeling. We report an sc electrical method for extracting these parameters experimentally with relatively simple instrumentation. The basic parameters of resistive microsensors, the resistance, temperature coefficient of resistance, thermal capacitance, and conductance, are derivable from the second harmonic signal of the output voltage induced by a sinusoidal driving current. The results are compared with other methods.	en_US
dc.language.iso	en_US	en_US
dc.subject	AC electrical method thermal variables measurement	en_US
dc.subject	electrothermal effect	en_US
dc.subject	parameter extraction	en_US
dc.subject	thermal microsensors	en_US
dc.title	Parameter extraction of resistive thermal microsensors by AC electrical method	en_US
dc.type	Article	en_US
dc.identifier.journal	IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT	en_US
dc.citation.volume	47	en_US
dc.citation.issue	2	en_US
dc.citation.spage	403	en_US
dc.citation.epage	408	en_US
dc.contributor.department	光電工程學系	zh_TW
dc.contributor.department	Department of Photonics	en_US
dc.identifier.wosnumber	WOS:000078557800011	-
dc.citation.woscount	5	-
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