标题: | 十二寸晶圆自动化搬运系统之高等产品优先服务与搬运时间预估之研究 Preemptive Hot Lots Services and Modularized Simulation for Lot Delivery Time Estimation in Automatic Material Handling Systems of 300mm Semiconductor Foundry |
作者: | 王嘉男 Chia-Nan Wang 梁馨科 Shing-Ko Liang 工业工程与管理学系 |
关键字: | 十二寸晶圆;半导体制造;自动搬运系统(AMHS);悬吊式自动搬运车(OHT);高等产品(Hot lot);优先权;模拟;300mm;AMHS;delivery time forecast;simulation;hot lot;preemptive;semiconductor manufacturing |
公开日期: | 2003 |
摘要: | 相较于八寸晶圆厂,十二寸晶圆(300mm)制造的产品种类较多样化。新产品试俥及试产亦较频繁。同时,制程变更及机台微调的频率亦增加,需要经常进行制程实验及产品、设备的监控作业。在生产过程中,此类试验或工程用晶圆会被赋予较高生产等级,以别于一般晶圆。十二寸晶圆厂必须能弹性地提供高等级产品(hot lot)之作业管理功能,以因应多样少量的生产型态,然而,目前在十二寸产品主要的搬运系统是悬吊式自动搬运车(OHT),并无此种功能设计。 本文有两个主要目标,一是发展出一套有效的OHT派车法则:Preemptive Priority Policy (PPP),使高等级产品能比一般产品优先处理,第二目标是提出一套有系统的搬运时间预估方式:Modularized Simulation Method (MSM),来对不同等级的产品进行准确的搬运时间预估。 本文收集台湾某十二寸晶圆厂实务资料并配合模拟来对本文提出的方法进行验证,结果显示PPP能有效的将高等级产搬运时间缩短21%且对一般产品的搬运时间没有显着影响。而MSM对不同等级的产品推估出的平均搬运时间与模拟结果相当接近,差异在0.1到0.2秒之间。这些实验结果经由多位台湾十二寸厂的生产制造专家评估验证后,都给予正面的肯定与评价,这两种方法对生产线的派工与缩短产品制造时间上有重大的帮助。 Highly automated material handling is one of the most concerns to foundry practitioners because efficient manual operations and coordination have been the core competence in 300mm manufacturing. Especially, one of the critical problems is how to provide an almost no-wait transport for hot lots in an automatic material handling environment. However, there is no effective method for hot lots handling in 300mm Overhead Hoist Transport (OHT) intrabay operation and no effective method to estimate delivery time in 300mm automatic material handling systems (AMHS) operation. There are two objectives of this paper. The first is to develop an effective OHT dispatching method, Preemptive Priority Policy (PPP), to provide the transport services for hot lots against the normal lots transport requirements under 300mm frequently blocking transportation situation. The second objective is to propose an analytic methodology, Modularized Simulation Method (MSM), to estimate the loop-to-loop delivery time for differentiated lots. Simulation experiments based on realistic data from a 300mm wafer foundry are conducted. The results demonstrate that the PPP method can effective expedite the movement of the hot lots for 21% shorter original delivery time. The MSM is also credible in estimating lot delivery times. The time differences between MSM and simulation for both priority lots and regular lots are 0.2 second and 0.1 second, respectively. The results of PPP and MSM have been verified by some 300mm fab managers and are both affirmative. |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#GT009033811 http://hdl.handle.net/11536/38824 |
显示于类别: | Thesis |
文件中的档案:
If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.