2-FREQUENCY DISPLACEMENT MEASUREMENT INTERFEROMETER BASED ON A DOUBLE-HETERODYNE TECHNIQUE

doi:10.1063/1.1142275

標題:	2-FREQUENCY DISPLACEMENT MEASUREMENT INTERFEROMETER BASED ON A DOUBLE-HETERODYNE TECHNIQUE
作者:	CHIEN, PY 交大名義發表光電工程學系 National Chiao Tung University Department of Photonics
公開日期:	1-Jan-1991
摘要:	A two-frequency laser heterodyne interferometer has been implemented for small displacement measurement. The displacement signal is detected by using a double-heterodyne technique. Vibration amplitudes at 1 kHz on the order of 1 nm and smaller can be detected.
URI:	http://dx.doi.org/10.1063/1.1142275 http://hdl.handle.net/11536/3922
ISSN:	0034-6748
DOI:	10.1063/1.1142275
期刊:	REVIEW OF SCIENTIFIC INSTRUMENTS
Volume:	62
Issue:	1
起始頁:	254
結束頁:	255
Appears in Collections:	Articles