標題: | Method for gauge block measurement with the heterodyne central fringe identification technique |
作者: | Wu, Wang-Tsung Chen, Yen-Liang Hsieh, Hung-Chih Chang, Wei-Yao Su, Der-Chin 光電工程學系 Department of Photonics |
公開日期: | 1-六月-2010 |
摘要: | In a modified Michelson interferometer, the top face of the wringing platen is first identified using the heterodyne central fringe identification technique. Then the reference mirror located in the other arm is moved by a precision translation stage until the top face of the tested gauge block is also identified with the same technique. The displacement of the mirror is exactly equivalent to the length of the tested gauge block. The measurable range of the interferometer relates to the maximum travel range of the translation stage and its uncertainty depends on the uncertainty of the heterodyne central fringe identification method and the resolution of the translation stage. (C) 2010 Optical Society of America |
URI: | http://dx.doi.org/10.1364/AO.49.003182 http://hdl.handle.net/11536/5314 |
ISSN: | 0003-6935 |
DOI: | 10.1364/AO.49.003182 |
期刊: | APPLIED OPTICS |
Volume: | 49 |
Issue: | 16 |
起始頁: | 3182 |
結束頁: | 3186 |
顯示於類別: | 期刊論文 |