標題: | High-accuracy thickness measurement of a transparent plate with the heterodyne central fringe identification technique |
作者: | Wu, Wang-Tsung Hsieh, Hung-Chih Chang, Wei-Yao Chen, Yen-Liang Su, Der-Chin 光電工程學系 Department of Photonics |
公開日期: | 20-七月-2011 |
摘要: | In a modified Twyman-Green interferometer, the optical path variation is measured with the heterodyne central fringe identification technique, as the light beam is focused by a displaced microscopic objective on the front/rear surface of the test transparent plate. The optical path length variation is then measured similarly after the test plate is removed. The geometrical thickness of the test plate can be calculated under the consideration of dispersion effect. This method has a wide measurable range and a high accuracy in the measurable range. (c) 2011 Optical Society of America |
URI: | http://dx.doi.org/10.1364/AO.50.004011 http://hdl.handle.net/11536/21526 |
ISSN: | 0003-6935 |
DOI: | 10.1364/AO.50.004011 |
期刊: | APPLIED OPTICS |
Volume: | 50 |
Issue: | 21 |
起始頁: | 4011 |
結束頁: | 4016 |
顯示於類別: | 期刊論文 |