標題: High-accuracy thickness measurement of a transparent plate with the heterodyne central fringe identification technique
作者: Wu, Wang-Tsung
Hsieh, Hung-Chih
Chang, Wei-Yao
Chen, Yen-Liang
Su, Der-Chin
光電工程學系
Department of Photonics
公開日期: 20-Jul-2011
摘要: In a modified Twyman-Green interferometer, the optical path variation is measured with the heterodyne central fringe identification technique, as the light beam is focused by a displaced microscopic objective on the front/rear surface of the test transparent plate. The optical path length variation is then measured similarly after the test plate is removed. The geometrical thickness of the test plate can be calculated under the consideration of dispersion effect. This method has a wide measurable range and a high accuracy in the measurable range. (c) 2011 Optical Society of America
URI: http://dx.doi.org/10.1364/AO.50.004011
http://hdl.handle.net/11536/21526
ISSN: 0003-6935
DOI: 10.1364/AO.50.004011
期刊: APPLIED OPTICS
Volume: 50
Issue: 21
起始頁: 4011
結束頁: 4016
Appears in Collections:Articles