應用無線辨識技術於半導體製造之個案研究

Abstract

目前，半導體晶圓代工業的發展，儼然成為整個IC供應鍊的一部份。在未來全球IC產業中的地位漸形重要，預估到2010年，晶圓代工的貢獻營收佔IC產業的比重將提高到約40%。然而，要促進晶圓代工的成長，除了藉由高效率的作業生產流程來達到高品質與高產出之外，更要兼顧成本的降低與高度自動化管理。由於RFID具有可無線方式對單一至多個的物件同時進行資料的辨識與蒐集，加上其成本低廉，近年來已受到全球各業界的矚目，被認為是影響未來全球發展的重要技術之一。相信半導體產業與RFID技術的相結合，對半導體業的成長，有其正面效益可期。 針對研究主題「應用無線射頻技術於半導體製造」，本研究採取個案研究法，試圖藉由個案的深度訪談與相關次級資料的蒐集等方式，探究個案公司導入RFID的歷程與現況，並進一步尋求所欲釐清的議題。 本研究的目的，在於釐清半導體廠導入RFID技術的動機與考慮因素，探究RFID在半導體廠應用、發展與其他標籤的比較(條碼和紅外線智慧標籤)，並與個案公司的專案負責人進行訪談，整理相關實際導入經驗與遭遇困難，提出其可行之晶圓廠系統設置與運作概念架構，及其導入模式，最後在現況評估與未來展望作一分析整理，提供學術界及實務界人士參考。

The foundries of semiconductor are now an integral part of the overall semiconductor supply-chain, and there is every reason to anticipate that the importance of the foundry segment to the IC industry will increase further. The relative importance of the foundry segment to the IC industry as a whole will continue to increase, and the impact revenue for the foundry segmnent should rise to nearly to 40% by 2010. However, for foundries increment future, it depends on high performance process flow to get high wafer-product throughput with high quality. It also needs to consider the cost and automated rate in the foundry of semiconductor manufacturing management. RFID technology has attracted the global interests and will impact the future global industrial development due to its properties of wireless data identifying/collecting, multiple reading at the same time, etc. We believe that semiconductor growth is just suited with the application of RFID to get obvious advantage. For the thesis topic "Applying Radio Frequency Identification (RFID) in Semiconductor Manufacturing", it adopts Case Study methodology via visiting Study Company to collect referable information. Besides, this thesis elaborate the Study Company’s experience in RFID technology applicability and clarify some lesson-learn issues in detail. This thesis purpose is to explain the trigger point of RFID development technology. Then, a comparison of RFID with both Barcode and Infrared Smart Tag was given. A feasible frame and possible approaches for implementing RFID systems on a semiconductor FAB was proposed after interviewing with experts of RFID system project manager of semiconductor Fabs. Finally, to look into the future and analysis the current state of adope RFID technology, this research to make up detailed analysis and arrangement for the academia and business reference.