半導體從業人員肌肉骨骼症狀調查

Abstract

目前可取得之半導體從業人員肌肉骨骼症狀調查之相關資訊，以針對無塵室工作人員為主，但無塵室主要工作人員可大致區分為生產線作業人員及設備工程師，而其工作性質差異很大，於肌肉骨骼症狀之產生部位應有不同，故於此次實驗中，設計搜集包含六吋、八吋及十二吋半導體從業人員共8303份資料進行肌肉骨骼症狀統計，受測人員包含生產線作業人員、製程工程師、設備工程師、廠務工程師及其他工作人員等群組。 分析結果顯示，生產線作業人員於各部位之症狀比例均較一般半導體人員為高，其中以腳及腳踝最為嚴重，而一般半導體從業人員之其他工作人員及製程工程師群組主訴有肌肉骨骼症狀的比例又高於設備及廠務工程師群組，此結果與一般半導體產業進行肌肉骨骼症狀之預防時的工作重點有異。 經統計，發現半導從業人員之肌肉骨骼症狀與所工作之晶圓廠晶圓尺吋相關，而有運動習慣者主訴有肌肉骨骼症狀的比例較低，建議可以改善工作姿勢、工作環境改善及進行簡易體操等方式進行肌肉骨骼症狀預防，而養成運動習慣對於肌肉骨骼症狀預防也有幫助。

Current research available for semiconductor-related musculoskeletal symptoms in Taiwan mainly comes from the data of clean room workers. Clean room workers can be divided broadly into operators and equipment engineers who have very different job function that should result in different musculoskeletal symptoms. In this experiment, we designed a simple questionnaire to collect and analysis the musculoskeletal symptom information form 8303 workers who worked in six-inch, eight-inch and 12-inch plants. The workers were divided in to operators, process engineers, equipment engineers, facility engineers and other workers for analysis. The results showed that operators have higher formation rate in various parts of body than general semiconductor workers, especially on foot and ankle. And other workers and process engineers have higher formation rate on musculoskeletal symptoms when compared with equipment and facility engineers. This result is different from how SHE department select the group to take preventive actions. The statistical result found that semiconductor worker’s musculoskeletal symptoms are related to the wafer size of plant they work for. And workers who have exercise habits have lower formation rate of musculoskeletal symptoms. Semiconductor plant can improve working posture, working environment and doing simple exercises in workplace to prevent musculoskeletal symptoms. Process engineers and other workers who mostly work in computer workstation should also be considered to take action on musculoskeletal symptoms prevention. Develop exercise habits can also be help to prevent musculoskeletal symptoms.